NANOTEKNOLOGI-NANOTEKNOLOGI
High-performance thin film piezoelectric microelectromechanical systems, Enhanced for Realistic Operating conditions
Since the mid 70’s, microelectromechanical systems (MEMS), have had a major impact on our modern, high-technological society. Thin film piezoelectric MEMS (TFPMEMS), carries on this MEMS-legacy, currently finding its way into factual technological applications, such as 3D cameras, gas-detectors, ...