ENIAC-prosjekt Lab4MEMS II - Micro-Optical MEMS, micro-mirrors and pico-projectors

In the project Lab4MEMS-II, a total of 19 companies, research institutes and universities in Europe are collaborating in the development of micro-optical components for application in projectors that can be integrated in mobile phones, compact 3D scanners, and miniaturized IR-spectrometers. The Norwegian partners SINTEF and Polewall AS are collaborating in the development of a module for wireless communication using a laser which gives much higher bandwidth than what is possible with solutions based on radio. The key part in the module is a micromirror that stabilizes the laser beam and ensures a stable link between two modules. This makes it possible to mount the modules on unstable platforms such as light poles that can vibrate due to wind or heavy traffic. In 2016, Polewall has made prototype modules for free-space optical wireless communication that includes the micromirror for laser beam stabilization. The modules are based on standard fiber-coupled telecom transceivers and also includes a camera chip which gives a low resolution image of the surroundings. This enables alignment of the module so that it communicates with the correct receiver module. The rough alignment is achieved with stepper motors that rotate the entire optical unit. The system has been demonstrated at several big international telecom companies with good results In November 2016 Polewall tested singlemode units together with Acreo at their lab in Kista, Sweden. Here the units were tested regarding signal quality at 10Gbps. Afterwards further tests were performed at Ericssons research labs. There the system was tested for transmission of 10Gbps bidirectional signals as well as transmission of analog radiosignals for the fronthaul of distributed antennasystems. Both tests were successful. For 10Gbps digital transmissions quantitative tests have been performed using equipment for bit error testing. At the same time errorfree bidirectional transmission of 10Gbps could be shown using Ericssons measurement quipment. In 2017 Polewall has further worked on higher transmission speed as well as the solution for lower speed is optimized. In February 2017 the system was demonstrated for several leading telecom Companies in Kista, Sweden. Testing has been performed together With RISE Acreo, an independent Swedish research institute. It has been demonstrated that 100Gbps bidirectional and 200Gbps unidirectional are possible. These high speed have been made possible because the SINTEF micromirror has high enough Precision to couple light between two singlemode fibres even if they are highly separated from each other.In this test the distance was limited to 40m du to the size limitations in the lab, but could have been much bigger. The systems are now close to could start the industrialization phase. The algorithms for stabilization of the laser beam are improved and solutions have been demonstratedwhere both end points can move several degrees without loss of the package in the link . Polewall is testing these systems now with a bigger supplier of telecom equipment. In 2018 Polewall has tested 10Gbps prototypes in a field test outside at different sites. It has been demonstrated that errorfree transmission over 200m is possible. SINTEF has further worked on the manufacturing process primarily by stabilizing various steps of the piezoMEMS process, installation of more automated Equipment and improving performance and reliability. The pilot line is now established and this has been verified by running a variation of the design and layer built up to test the limits of the process. A method for protection of the mirrors against humidity has been further developed, which increases the lifetime of the mirrors substantially. The activity on reliable packaging of micromirrors has been reported at an international conference.

According to the outcomes of the High Level Group on KET, the main driving force behind the development of future innovative goods and services will be Key Enabling Technologies (KETs), such as nanotechnology and nanoelectronics including semiconductors. Mastering these technologies leads to play an important role in the R&D, innovation and cluster strategies of many industries are regarded as crucial for ensuring the competitiveness of European industries in today?s knowledge economy. STMicroelectronics (Project Coordinator) is among the leading centers of excellence on "More Than Moore" technology identified at European level by the HLG on KET. Lab4MEMS II will feature the Pilot Line for innovative technologies on advanced Micro-Opto-Electro-Mechanical Systems (MOEMS). This is not just a special class of MEMS systems in fact, but it deals with MEMS merged with Micro-optics, which involves sensing or manipulating optical signals on a very small size scale, using integrated mechanical, optical, and elect rical systems. MOEMS includes a variety of devices including optical switch, array of micro-mirrors, optical cross-connect, lasers and micro lens amongst others. These devices are usually fabricated using micro-optics and standard micromachining technolog ies using materials like silicon, molybdenum (Mo), silicon dioxide, silicon nitride (Si3N4), piezo coating, etc.