Qualification of 3D silicon micro dosimeters

The acquired theoretical understanding during the Si-3DMiMic project, allowed the fabrication of test devices which turned out to have outstanding performance. The established knowledge platform is thus an excellent base for realizing Commercial dosimeters for real-time monitoring of the radiation dose in biological matter, with potential applications in many fields (medical, aerospace etc.). The qualifying project aims at introducing some modifications to the existing devices that will lead to unprecedented measurement accuracy combined to a very low irradiation beam perturbation and with the ability of mimicking the behavior of biological matter and detecting the secondary products of the irradiation. The work will mostly focus on the technological steps required to remove the excess material present in the current devices and replace it with a tissue-equivalent material. A set of processing steps aimed at this will be developed. The obtained devices will be electrically validated and packaged. The functional verification will then be carried out with standard radiation sources following the same procedures established in the Si-3DMiMic project. The proposed device verification will enable a commercialization project application for FORNY2020.