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NANO2021-Nanoteknologi og nye materiale

Gallium Oxide Fabrication with Ion Beams (GoFIB)

Alternativ tittel: Ionestrålefremstilt galliumoksid

Tildelt: kr 3,9 mill.

Vår innovasjon ligger i en ny foreslått metode som skal muliggjøre polymorfe transformasjoner i Ga2O3 på en teknisk gjennomførbar måte gjennom ioneimplantasjon. I vår metode bruker vi de gradvis akkumulerte strålingsskadene i krystalen. Disse kan introduseres både over store waferområder og lokalt. Gjennom bruk av både teoretiske og eksperimentelle tilnærminger, vil vi undersøke og avsløre mekanismene til disse interessante transformasjonene samt utforske endringen av de fysiske egenskapene til de fremstilte materialene.

Our innovation is in proposing a new method to realize the strain induced polymorph transformations in Ga2O3 in a technologically viable way using ion implantation. Indeed, in our method, the strain is applied by the gradually accumulated radiation disorder that can be introduced both over large wafer areas and locally. For that reason, using both theoretical and experimental approaches, we will investigate and unveil the mechanisms of these interesting transformations and explore the tunability of the physical properties of the fabricated materials. We will utilize state-of-the-art theoretical methods to enable the ultimate understanding of the new phase nucleation to improve the controllability of the process by employing a reliable machine-learned interatomic potential. Such modelling will allow extensive dynamic simulations of the radiation assisted polymorph transitions in Ga2O3. Moreover, we will combine these results with detailed analysis of the structural defects and metal implants in form of separate ions or small segregated clusters. This will enable controlled modification of electrical, opto-electrical, and thermal properties of newly grown nanostructures. On the experimental side, we will explore the capabilities of both conventional implants and focused ion beam (FIB) implants, employing a strong arsenal of the characterization methods to collect the data. FIB based spatially resolved irradiation provides a maximum of flexibility and fast turn over during the development of new functionalities, based on local structuring of different polymorphs. The combination of conventional broad beam irradiation and highly flexible FIB irradiation will allow assessing the scalability of the fabrication technology developed during the project.

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NANO2021-Nanoteknologi og nye materiale