MiNaLab - Microsystems and nanotechnology

Through the MiNaLab project, we propose: - to develop processes and technology for application of porous silicon(PS) in MEMS. The technology will be demonstrated in an osmotic pressure cell and in a micro evaporator - to improve the understanding of flu id flow in microfluid systems specifically on capillary driven dual (liquid/gas) flow and on continuos flow described by the Navier-Stokes equations. Surface modification, bonding compatibility of primers used for modifications and modelling of different devices are included - to develop new Defractive Optical Elements (DOE) concepts and devices for spectroscopy, dense wavelength division multiplexing, optical wavelength demultiplexing, and interferometric sensors - to develop macroscopic models for d ifferent energy domains applied in multiphysics simulation and design, as well as models for nano-scale effects observed in MEMS - to establish a world class MEMS design centre through development of methodologies for co-design of sensor/actuator, electr onics/ASIC, and package using a system oriented approach. - to expand the first-level-packaging competence at SINTEF by developing new processes and technology for horizontal and vertical electrical feedthroughs