Single-Chip Integration of MEMS Micropumps with Optical Waveguides for Laser Absorption Spectroscopy

Single-Chip Integration of MEMS Micropumps with Optical Waveguides for Laser Absorption Spectroscopy

Microbiological research is concerned with studies of microbial gas consumption and production, which is tightly linked to natural greenhouse gas emissions, but also sinks. Currently, such studies require large and expensive instrumentation like gas chromatography systems, which also sacrifice the sample during each measurement. This affects the conditions of the sample, and yields unsatisfactory temporal resolution due to the need for sample handling. In this project, I propose to leverage the latest advances in MEMS and nanophotonics to develop the first chip platform integrating optical waveguides with micropumps, which will facilitate tuneable diode laser absorption spectroscopy (TDLAS) under vacuum and in closed valume without sacrificing the sample gas. With the addition of lasers and light detectors, it will enable inexpensive, low weight, portable devices for real-time, in situ trace gas detection. Such device will not only impact microbiological research, but also sensor networks much needed e.g., in cities for controlling the air quality.