Mid InfraRed PHotonics devices fABrication for chemical Sensing and Spectroscopic applications

MIRPHAB aims at introducing a novel class of devices and methods for optical detection of chemicals. This goal will be pursued by the integration and the assessment of a number of exiting developments to assure manufacturability over the whole fabrication chain. Based on a massive use of IC/MEMS technologies, the pilot line will enable a variety of new key functionalities for next generation of chemical sensing and spectroscopy, allowing cost, power consumption and size reduction. Where required, the development of novel process modules exploiting the capability of a mixed Si/III-V technology will bring unexplored capabilities to sensors, opening the way to a number of applications not addressable with the technologies available today. The standardization of fabrication process & devices and the assessment of the full supply chain from chip fabrication to packaged and tested devices will be the main target objectives of the platform activity. At end of the project, the pilot line will have settled the full industrial supply chain to make ready-to-use sensing devices available for application developers on commercial basis.