Solid state oxide targets for physical deposition of thin films in industry and academia

Physical deposition of thin films is important for many technologies, such as displays, solar cells and sensors. The feedstock for this technology is solid targets where high density, homogeneous microstructure chemical and phase composition are critical parameters for the quality of the deposited films. There is also a growing R&D market for targets where the materials are less defined, as new and emerging materials are introduced continuously. Cerpotech is a SME focusing on production of high quality fine oxide powders for both R&D market and industry. The technology platform for the company is spray pyrolysis of aqueous precursor solutions. Phase purity and particle size are the main advantages of this technology in addition to the flexibility to fabricate tailor made oxide powders defined by demanding customers. Based on this core technology platform Cerpotech can quickly establish production protocols for complex emerging materials demanded by customers. In this project the feasibility to prepare solid state targets based on powders fabricated by spray pyrolysis will be addressed. Possible technologies for sintering of targets such as hot pressing and spark plasma sintering will be evaluated. Specific oxide targets will be prepared and tested.